5-Methylene-1,3-dioxolan-4-one derivatives, process for their production, polymers of the derivatives, resist compositions, and pattern formation process
申请人:——
公开号:US20040248031A1
公开(公告)日:2004-12-09
The 5-methylene-1,3-dioxolan-4-one derivative of the present invention is represented by the formula (1) indicated below, and it is a novel monomer from which a homopolymer and a copolymer excellent in light transparency and heat stability are obtained. Moreover, the polymer obtained by (co)polymerizing a monomer composition comprising the derivative represented by the formula (1) indicated below is excellent in the resist performance such as sensitivity, resolution and dry etching resistance, and solubility in an organic solvent, also having little line edge roughness, and thus it is preferably used as a resin for a resist composition.
1
wherein R
1
represents a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms, or a linear or branched alkyl group containing 1 to 6 carbon atoms which has a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms as a substituent; R
2
represents a hydrogen atom, or a linear or branched alkyl group containing 1 to 6 carbon atoms; or R
1
and R
2
represent a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms together with the carbon atom to which they are bound,
provided that the alkyl group and the bridged cyclic hydrocarbon group may have at least one substituent selected from a group consisting of a linear or branched alkyl group containing 1 to 6 carbon atoms which may be optionally substituted, a hydroxy group, a carboxy group, an acyl group containing 2 to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, and a carboxy group esterified with an alcohol containing 1 to 6 carbon atoms.
本发明的5-亚甲基-1,3-二氧杂环戊酮衍生物的化学式如下所示,是一种新型单体,可制备出具有优异光透明度和热稳定性的均聚物和共聚物。此外,通过聚合由下式表示的衍生物组成的单体混合物得到的聚合物具有优异的感光性、分辨率、干法蚀刻抗性和有机溶剂溶解性,同时具有较小的线边粗糙度,因此它可作为光刻胶组分的树脂。其中,R1代表含有4到16个碳原子的桥环烃基,或含有4到16个碳原子的桥环烃基作为取代基的线性或支链烷基,R2代表氢原子,或含有1到6个碳原子的线性或支链烷基,或R1和R2与它们所连接的碳原子一起代表含有4到16个碳原子的桥环烃基,前提是烷基和桥环烃基可以具有至少一个选自以下一组的取代基:含有1到6个碳原子的线性或支链烷基(可以选择性地被取代)、羟基、羧基、含有2到6个碳原子的酰基、含有1到6个碳原子的烷氧基和含有1到6个碳原子的醇酯化的羧基。