申请人:Sumitomo Bakelite Co., Ltd.
公开号:US20140205948A1
公开(公告)日:2014-07-24
Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.
本发明揭示了用于形成自显影薄膜的共聚物及其组合物。这样的共聚物包括诺博尔烯型重复单元和马来酸酐型重复单元,其中至少一部分马来酸酐型重复单元已经开环。从这样的共聚物组合物形成的薄膜为微电子和光电子器件提供自显影、低k值、热稳定的层。