Novel tertiary (meth)acrylates having lactone structure, polymers, resist compositions and patterning process
申请人:Watanabe Takeru
公开号:US20050250924A1
公开(公告)日:2005-11-10
Novel tertiary (meth)acrylate compounds having a lactone structure are polymerizable into polymers having improved transparency, especially at the exposure wavelength of an excimer laser and dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, have a high resolution, and lend themselves to micropatterning with electron beams or deep-UV rays.
Electrochemically induced oxidative S–O coupling: synthesis of sulfonates from sulfonyl hydrazides and <i>N</i>-hydroxyimides or <i>N</i>-hydroxybenzotriazoles
作者:Alexander O. Terent'ev、Olga M. Mulina、Vadim D. Parshin、Vladimir A. Kokorekin、Gennady I. Nikishin
DOI:10.1039/c8ob03162b
日期:——
oxidation of the starting compounds to form a coupling product. The developed strategy represents a quite atom-efficient approach: one partner loses two nitrogen and three hydrogen atoms, while another one loses only one hydrogen atom. Cyclic voltammetry and the control experiment allowed us to propose possible reaction pathways: generated through anodic oxidation molecular bromine or its higher oxidation
开发了在电流作用下的氧化S-O偶联过程。芳基,杂芳基和烷基磺酰基酰肼和Ñ羟基化合物(Ñ -hydroxyimides和Ñ -hydroxybenzotriazoles)应用于作为起始试剂磺酸盐的制备。该反应在恒定电流条件下在实验方便的配有石墨阳极和不锈钢阴极的不分隔电化学电池中在高电流密度(60 mA cm -2)下进行。NH 4在此过程中,Br充当支撑电解质,并参与起始化合物的氧化,以形成偶联产物。制定的策略代表了一种相当有效的原子效率方法:一个配偶体损失两个氮原子和三个氢原子,而另一个伙伴仅损失一个氢原子。循环伏安法和对照实验使我们能够提出可能的反应途径:通过阳极氧化分子溴或其较高氧化态衍生物产生的氧化途径将起始化合物氧化而形成反应性物种,然后形成S-O键。
Compositions and Methods Incorporating Photocatalysts
申请人:Baker Ellen Schmidt
公开号:US20090285768A1
公开(公告)日:2009-11-19
The various embodiments provide a composition including an active material having functional groups capable of covalent attachment to a substrate in the presence of an acid or a base, a photocatalyst capable of generating an acid or a base upon exposure to light, and a vehicle. The compositions may also include surfactants, emulsifiers, oxidants, and other components. A method for treating a substrate is also disclosed. The method includes the steps of applying at least one active material having functional groups to the substrate, applying a photocatalyst to the substrate, and exposing the photocatalyst and the at least one active material to light for forming covalent attachments between the functional groups and constituent groups on the substrate. The compositions and methods described herein are useful in personal care product and consumer care product applications, for example.
Developable bottom antireflective coating compositions are provided.
提供可开发底部防反射涂层组合物。
Polymerizable fluorinated ester, manufacturing method, polymer, photoresist composition and patterning process
申请人:Kinsho Takeshi
公开号:US20060009602A1
公开(公告)日:2006-01-12
Polymerizable fluorinated ester compounds having formula (1) or (2) are novel wherein R
1
is H, methyl or trifluoromethyl, R
2
is a divalent hydrocarbon group, R
3
is H or a monovalent hydrocarbon group, or R
2
and R
3
, taken together, may form a ring, R
4
is H, OH or a monovalent hydrocarbon group, and R
5
is an acid labile group. They are most useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions.