Composition and method for manufacturing device using same
申请人:TOYO GOSEI CO., LTD.
公开号:US11142495B2
公开(公告)日:2021-10-12
An onium salt and a composition having high sensitivity and excellent pattern characteristics such as LWR, which is preferably used for a resist composition for a lithography process using two active energy rays of a first active energy ray such as an electron beam or an extreme ultraviolet and a second active energy ray such as UV.
COMPOSITION AND METHOD FOR MANUFACTURING DEVICE USING SAME
申请人:TOYO GOSEI CO., LTD.
公开号:US20200048191A1
公开(公告)日:2020-02-13
An onium salt and a composition having high sensitivity and excellent pattern characteristics such as LWR, which is preferably used for a resist composition for a lithography process using two active energy rays of a first active energy ray such as an electron beam or an extreme ultraviolet and a second active energy ray such as UV.