申请人:——
公开号:US20040209186A1
公开(公告)日:2004-10-21
New oxime sulfonate compounds of the formula (I) and (II), wherein R
1
is C
1
-C
12
alkyl, C
1
-C
4
haloalkyl, hydrogen, OR
9
, NR
10
R
11
, SR
12
or is phenyl which is unsubstituted or substituted by OH, C
1
-C
18
alkyl, halogen and/or C
1
-C
12
alkoxy; R
2
, R
3
, R
4
and R
5
are for example hydrogen or C
1
-C
12
alkyl; R
6
is for example is C
1
-C
18
alkylsulfonyl, phenyl-C
1
-C
3
alkylsulfonyl or phenylsulfonyl; R′
6
is for example phenylenedisulfonyl or diphenylenedisulfonyl; R
7
, R
8
and R
9
for example are hydrogen or C
1
-C
6
alkyl; R
10
and R
11
, are for example hydrogen or C
1
-C
18
alkyl; R
12
is for example hydrogen, phenyl or C
1
-C
18
alkyl; A is S, O, NR
13
, or a group of formula A1, A2 or A3, R
21
and R22 independently of one other have one of the meanings given for R
7
; R
23
, R
24
, R
25
and R
26
independently of one another are for example hydrogen, C
1
-C
4
alkyl, halogen or phenyl; Z is CR
22
or N; and Z
1
is CR
22
or N; and Z
1
is CR
22
or N; and Z
1
is CH
2-
, S, O or NR
13
are particularly suitable as photo-latent acids in resist applications.
1
新的肟磺酸化合物的化学式为(I)和(II),其中R1为C1-C12烷基,C1-C4卤代烷基,氢,OR9,NR10R11,SR12或为苯基,其未经取代或取代为OH,C1-C18烷基,卤素和/或C1-C12烷氧基; R2,R3,R4和R5例如为氢或C1-C12烷基; R6例如为C1-C18烷基磺酰基,苯基-C1-C3烷基磺酰基或苯基磺酰基; R′6例如为苯基二磺酰基或二苯基二磺酰基; R7,R8和R9例如为氢或C1-C6烷基; R10和R11例如为氢或C1-C18烷基; R12例如为氢,苯基或C1-C18烷基; A为S,O,NR13或化学式A1,A2或A3的基团,R21和R22相互独立地具有R7给出的含义之一; R23,R24,R25和R26相互独立地例如为氢,C1-C4烷基,卤素或苯基; Z为CR22或N; Z1为CR22或N; Z1为CH2-,S,O或NR13,特别适用于光致酸在光刻应用中。