ADHESIVE COMPOSITION, ADHESIVE TAPE, METHOD FOR PROCESSING SEMICONDUCTOR WAFER AND METHOD FOR PRODUCING TSV WAFER
申请人:Sekisui Chemical Co., Ltd.
公开号:EP2551323A1
公开(公告)日:2013-01-30
The present invention aims to provide an adhesive composition having high adhesive strength, as well as being easily detachable and having excellent heat resistance, an adhesive tape comprising the adhesive composition, a method for treating a semiconductor wafer using the adhesive tape, and a method for producing a TSV wafer. The present invention relates to an adhesive composition comprising: an adhesive component; and a tetrazole compound represented by the following formula (1), formula (2), or formula (3), or its salt:
wherein R1 and R2 each may be hydrogen, a hydroxy group, an amino group, or a C1-C7 alkyl group, alkylene group, phenyl group, or mercapto group; and the C1-C7 alkyl group, alkylene group, phenyl group, and mercapto group may be substituted.
本发明旨在提供一种具有高粘合强度、易剥离且具有优异耐热性的粘合剂组合物、一种包含该粘合剂组合物的胶带、一种使用该胶带处理半导体晶片的方法以及一种生产TSV晶片的方法。本发明涉及一种粘合剂组合物,包括:粘合剂成分;以及由下式(1)、式(2)或式(3)代表的四唑化合物或其盐:
其中 R1 和 R2 可分别为氢、羟基、氨基或 C1-C7 烷基、亚烷基、苯基或巯基;且 C1-C7 烷基、亚烷基、苯基和巯基可被取代。