Surface treatment liquid, surface treatment method, and method for suppressing pattern collapse
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US10961422B2
公开(公告)日:2021-03-30
A surface treatment liquid capable of hydrophobizing a surface of a treatment target without including a silylation agent, a surface treatment method using the liquid, and a method for suppressing pattern collapse, including surface treatment by the surface treatment method. The liquid contains a nitrogen-containing heterocyclic compound as a water-repelling agent. A compound including one or more hydrocarbon groups which may be substituted with a halogen atom in which a total number of carbon atoms of the one or more hydrocarbon group is three or more, is used as the nitrogen-containing heterocyclic compound. The liquid may include only a nitrogen-containing heterocyclic compound having the above-described predetermined structure, as a water-repelling agent.
一种无需硅烷化剂即可使处理对象表面疏水的表面处理液、一种使用该液体的表面处理方法,以及一种抑制图案塌陷的方法,包括通过该表面处理方法进行的表面处理。该液体含有作为憎水剂的含氮杂环化合物。含氮杂环化合物包括一个或多个可被卤素原子取代的烃基,其中一个或多个烃基的碳原子总数为三个或更多。作为憎水剂,液体中可以只包含具有上述预定结构的含氮杂环化合物。