The present invention relates to a metal polishing liquid for polishing at least a part of metal in a substrate having the metal, comprising, component A: a metal solubilizer containing amino acids, component B: compounds having the benzotriazole skeleton, and component C: an acrylic acid polymer having the weight average molecular weight of 10,000 or more, and having the mass ratio between the component B and the component C, (component B:component C), to be 1:1 to 1:5. Use of the metal polishing liquid can simultaneously yield high polishing rates and low etching rates at higher level, enabling to form an embedded pattern with higher reliability.
本发明涉及一种
金属抛光液,用于对具有
金属的基体中的至少部分
金属进行抛光,该抛光液由以下组分组成:组分 A:含有
氨基酸的
金属
增溶剂;组分 B:具有苯并三唑骨架的化合物;以及组分 C:重量平均分子量在 10,000 或以上的
丙烯酸聚合物,且组分 B 与组分 C 之间的质量比(组分 B:组分 C)为 1:1 至 1:5。使用
金属抛光液可同时获得较高的抛光率和较低的蚀刻率,从而形成可靠性更高的嵌入图案。