A resist composition containing: (A) a resin containing a repeating unit having an acid-labile group and not containing a repeating unit having an aromatic substituent; (B) a photo-acid generator shown by a general formula (B-1); and (C) a solvent, where W
1
represents a cyclic divalent hydrocarbon group having 4 to 12 carbon atoms and containing a heteroatom; W
2
represents a cyclic monovalent hydrocarbon group having 4 to 14 carbon atoms and not containing a heteroatom; Rf represents a divalent organic group shown by the following general formula; and M
+
represents an onium cation. This provides a resist composition and a patterning process that uses the resist composition that show a particularly favorable mask dimension dependency (mask error factor: MEF), LWR, and critical dimension uniformity (CDU) particularly in photolithography where a high-energy beam such as an ArF excimer laser beam is used as a light source.
一种抗蚀组合物,包含:(A)一种
树脂,其中包含具有酸敏基团的重复单元,且不含芳香基取代的重复单元;(B)一种通过通式(B-1)表示的光酸发生剂;以及(C)一种溶剂,其中W1表示具有4至12个碳原子且含有杂原子的环状二价碳氢基团;W2表示具有4至14个碳原子且不含杂原子的环状一价碳氢基团;Rf表示由以下通式表示的二价有机基团;M+表示一个离子阳离子。这提供了一种抗蚀组合物和使用该抗蚀组合物的图案化过程,该过程在光刻工艺中特别显示出有利的掩模尺寸依赖性(掩模误差因子:MEF)、线宽粗糙度(LWR)和临界尺寸均匀性(CDU),特别是在使用高能量光源,如ArF准分子激光器光束时。