PHOTOLYTIC ACID-GENERATING POLYMERS AND MONOMERS FOR THEIR CONSTRUCTION
申请人:BRAINARD Robert L.
公开号:US20110130538A1
公开(公告)日:2011-06-02
Polymers for photoresists and monomers for incorporation into those polymers are disclosed. The polymers comprise a photoacid generator (PAG) component and at least a second component that is photolytically stable and acid-stable. The polymers may also contain a third, acid-labile component. The photoacid generator is based on N-sulfoxyimides and related moieties that contain photolabile oxygen-heteroatom and oxygen-aromatic carbon bonds.
CHAIN SCISSION POLYESTER POLYMERS FOR PHOTORESISTS
申请人:Brainard Robert L.
公开号:US20110127651A1
公开(公告)日:2011-06-02
Polymers for extreme ultraviolet and 193 nm photoresists are disclosed. The polymers comprise a photoacid generator (PAG) residue, an acid cleavable residue and a diacid joined by ester linkages. The polymers include a photoacid generating diol, a diacid and an acid table diol.
[EN] CHAIN SCISSION POLYESTER POLYMERS FOR PHOTORESISTS<br/>[FR] POLYMÈRES POLYESTER À SCISSION DE CHAÎNES POUR RÉSINES PHOTOSENSIBLES
申请人:UNIV NEW YORK STATE RES FOUND
公开号:WO2009105667A2
公开(公告)日:2009-08-27
Polymers for extreme ultraviolet and 193 nm photoresists are disclosed. The polymers comprise a photoacid generator (PAG) residue, an acid cleavable residue and a diacid joined by ester linkages. The polymers include a photoacid generating diol, a diacid and an acid lable diol.