申请人:International Business Machines Corporation
公开号:US05672760A1
公开(公告)日:1997-09-30
The present invention provides an ablatively photodecomposable polymer having a photoabsorber bound to the polymer (the "ablatively photodecomposable polymer") which does not phase separate, nor does it crystallize. The ablatively photodecomposable polymer provides even ablation, high resolution and in preferred embodiments, can withstand potassium permanganate etchant and ferric chloride etchant. The ablatively photodecomposable polymer is strippable, although it can remain on the substrate if desired. The ablatively photodecomposable polymer comprises a polymer to which a photoabsorber is bound, either covalently or ionically. The present invention is also directed to a process for forming a metal pattern on a substrate employing the ablatively photodecomposable polymer.
本发明提供了一种具有光吸收剂与聚合物结合的可烧蚀光降解聚合物(“可烧蚀光降解聚合物”),其不会相分离,也不会结晶。可烧蚀光降解聚合物提供均匀的烧蚀、高分辨率,并且在优选实施例中,可以承受高锰酸钾蚀刻剂和氯化铁蚀刻剂。可烧蚀光降解聚合物可剥离,但如果需要,它也可以保留在基板上。可烧蚀光降解聚合物包括聚合物和光吸收剂,两者通过共价键或离子键结合。本发明还涉及一种使用可烧蚀光降解聚合物在基板上形成金属图案的方法。