The present invention provides a silicone skeleton-containing polymer compound containing a repeating unit shown by the general formula (1) and having a weight average molecular weight of 3,000 to 500,000. There can be provided a silicone skeleton-containing polymer compound suitable used as a base resin of a chemically amplified negative resist composition that can remedy the problem of delamination generated on a metal wiring such as Cu and Al, an electrode, and a substrate, especially on a substrate such as SiN, and can form a fine pattern without generating a scum and a footing profile in the pattern bottom and on the substrate when the widely used 2.38% TMAH aqueous solution is used as a developer.
本发明提供了一种含有
硅骨架的
聚合物化合物,其包含由通式(1)所示的
重复单元,并具有3,000至500,000的重均分子量。可以提供一种适用于
化学增强负型光阻组合物的
基础树脂的
硅骨架
聚合物化合物,该组合物可以纠正在
金属线路(如Cu和Al)、电极和基板(尤其是在SiN基板上)上产生的剥离问题,并且可以在使用广泛使用的2.38%T
MAH
水溶液作为显影剂时,在图案底部和基板上不生成污染物和足型轮廓的情况下形成细小的图案。