Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.
Organoaminosilanes,例如但不限于
二异丙基氨基
硅烷(
DIPAS),是沉积含
硅膜如
硅氧化物和
硅氮化物膜的前体。本文描述了通过催化氢
硅化反应将
亚胺与含有氢
硅烷的
硅源反应制备出有机
氨基
硅烷化合物,或其他化合物如有机
氨基二
硅烷和有机
氨基碳
硅烷的方法。