Selective metal deposition controlled by light irradiation was achieved for Zn, Mg, and Mn on a photochromic diarylethene (DAE) film; metal vapor atoms were deposited only on the colored film but not on the uncolored film. The deposition properties of the metals were strongly dependent on the deposition rates. Fine metal patterns were produced by laser scanning and a conventional vacuum-evaporation method without a shadow mask. Multiple-metal pattern preparation of Zn, Mg, and Mn via a maskless evaporation in a single vacuum process was also demonstrated.
在光致变色二元
乙烯(
DAE)薄膜上实现了由光照射控制的
锌、
镁和
锰的选择性
金属沉积;
金属蒸气原子只沉积在有色薄膜上,而不沉积在无色薄膜上。
金属的沉积特性与沉积速率密切相关。通过激光扫描和传统的无阴影掩膜真空蒸发方法制备出了精细的
金属图案。此外,还演示了在单一真空工艺中通过无掩膜蒸发制备
锌、
镁和
锰的多
金属图案。