RAW MATERIAL FOR CHEMICAL DEPOSITION COMPOSED OF ORGANOPLATINUM COMPOUND, AND CHEMICAL DEPOSITION METHOD USING THE RAW MATERIAL FOR CHEMICAL DEPOSITION
申请人:TANAKA KIKINZOKU KOGYO K.K.
公开号:US20180072765A1
公开(公告)日:2018-03-15
The present invention relates to a raw material for chemical deposition shown in a formulae below and including an organoplatinum compound in which diimine containing two imines and an alkyl anion are coordinated to divalent platinum. In the formulae, each of substituents R
1
to R
4
on the diimine represents a hydrogen atom, an alkyl group or the like and has a carbon number of 5 or less. Each of alkyl anions R
5
and R
6
is an alkyl group having a carbon number of 1 or more and 3 or less. The raw material has high vapor pressure and low decomposition temperature, and thus it is possible to manufacture a platinum thin film at low temperature.
Organoplatinum Complexes of the N,N-Diisopropyl-diazabutadiene Ligand: A Structural and Spectroscopic Study
作者:Axel Klein、Thilo Schurr、Stanislav Záliš
DOI:10.1002/zaac.200500106
日期:2005.10
Organoplatinumcomplexes (Pt(R)2(iPr-DAB)), (PtCl(R)(iPr-DAB)) or (PtCl2(iPr-DAB)) (R methyl or 2,4,6-tri- methylphenyl mesityl, iPr-DAB N,N-diisopropyl-1,4-diazabu- tadiene) have been investigated by a combination of multiple spec- troscopy (NMR, UV/VIS), single crystal XRD and quantum che- mical calculations. Excellent agreement of calculated and experi- mental structural data from XRD or NMR provide