METHOD FOR PRODUCING POLYMER, POLYMER, COMPOSITION FOR FORMING INSULATING FILM, METHOD FOR PRODUCING INSULATING FILM, AND INSULATING FILM
申请人:JSR Corporation
公开号:EP1705206A1
公开(公告)日:2006-09-27
There are provided a method for producing a polymer, a polymer, an insulating-film-forming composition, a method for producing an insulating film, and an insulating film capable of forming a film which is suitably used as an interlayer dielectric for semiconductor devices or the like and exhibits a low relative dielectric constant, excellent mechanical strength and adhesion, and uniform quality.
A method for producing a polymer of the invention comprises hydrolyzing and condensing (B) a hydrolyzable-group-containing silane monomer in the presence of (A) a polycarbosilane, the polycarbosilane (A) being a polymer (I) obtained by reacting (a) a compound shown by the following general formula (1) and (b) at least one compound selected from the group consisting of a compound shown by the following general formula (2) and a compound shown by the following general formula (3) in an organic solvent in the presence of at least one of an alkali metal and an alkaline earth metal,
R1kCX4-k (1)
R2kSiY4-k (2)
R3mY3-mSiCR4nX3-n (3)
wherein R1 to R4 individually represent a monovalent organic group or a hydrogen atom, X represents a halogen atom, Y represents a halogen atom or an alkoxy group, k represents an integer from 0 to 3, and m and n individually represent integers from 0 to 2.
DEHMLOW E. V.; LISSEL M., LIEBIGS ANN. CHEM., 1980, NO 1, 1-13
作者:DEHMLOW E. V.、 LISSEL M.
DOI:——
日期:——
METALLOCENE COMPOUNDS AS CATALYST COMPONENTS FOR OLEFIN POLYMERIZATION
申请人:Chisso Corporation
公开号:EP1066300A1
公开(公告)日:2001-01-10
Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film
申请人:Nakagawa Hisashi
公开号:US20070015892A1
公开(公告)日:2007-01-18
A method for producing a polymer includes hydrolyzing and condensing (B) a hydrolyzable-group-containing silane monomer in the presence of (A) a polycarbosilane, the polycarbosilane (A) being a polymer (I) obtained by reacting (a) a compound shown by the following general formula (1) and (b) at least one compound selected from the group consisting of a compound shown by the following general formula (2) and a compound shown by the following general formula (3) in an organic solvent in the presence of at least one of an alkali metal and an alkaline earth metal,
R
1
k
CX
4-k
(1)
R
2
k
SiY
4-k
(2)
R
3
m
Y
3-m
SiCR
4
n
X
3-n
(3)
wherein R
1
to R
4
individually represent a monovalent organic group or a hydrogen atom, X represents a halogen atom, Y represents a halogen atom or an alkoxy group, k represents an integer from 0 to 3, and m and n individually represent integers from 0 to 2.