申请人:Jiangsu Nata Opto-Electronic Materials Co. Ltd.
公开号:US11111256B2
公开(公告)日:2021-09-07
A composition, comprising: trisilylamine and less than 5 ppmw of halogen. A method of making a silylamine comprising combining ammonia and a compound comprising aminosilane functionality, where the compound comprising aminosilane functionality is according to formula (I) R1 N(R2)a(SiH3)2−a (I), where R1 is an organic polymer, a C-1-20 hydrocarbyl group or —SiR331, where R3 is C1-6 hydrocarbyl, R2 is a C-1-20 hydrocarbyl group, H, or —SiR331, where R3 is as defined above, subscript a is 0 or 1, provided that R1 and R2 may be the same or different except if R1 is phenyl, R2 is not phenyl, under sufficient conditions to cause a reaction to form a silylamine and a byproduct.
一种组合物,包括:三硅烷基胺和小于 5 ppmw 的卤素。一种制造硅胺的方法,包括将氨与包含氨基硅烷官能团的化合物结合,其中包含氨基硅烷官能团的化合物根据式 (I) R1 N(R2)a(SiH3)2-a (I),其中 R1 是有机聚合物、C-1-20 烃基或 -SiR331、其中 R3 为 C1-6 烃基,R2 为 C-1-20 烃基、H 或-SiR331,其中 R3 如上定义,下标 a 为 0 或 1,条件是 R1 和 R2 可以相同或不同,除非 R1 为苯基,R2 不是苯基,在足够的条件下引起反应生成硅胺和副产物。