New acid-labile group protected hydroxystyrene polymers or copolymers thereof and their application to radiation sensitive materials
申请人:Clariant Finance (BVI) Limited
公开号:EP0827970B1
公开(公告)日:2001-09-26
US5200544A
申请人:——
公开号:US5200544A
公开(公告)日:1993-04-06
US5852128A
申请人:——
公开号:US5852128A
公开(公告)日:1998-12-22
Resist materials
申请人:AT&T Bell Laboratories
公开号:US05200544A1
公开(公告)日:1993-04-06
A class of resist compositions sensitive to deep ultraviolet radiation includes a resin sensitive to acid and a composition that generates acid upon exposure to such radiation. A group of nitrobenzyl materials is particularly suitable for use as the acid generator.