The purpose of the present invention to provide: a composition which can be used for water-repellent treating of the entire surface of a semiconductor substrate having a pattern formed by laminating a Si-containing insulating layer and a metal layer, at one time; and a method for water-repellent treatment of the semiconductor substrate surface using the composition.
The present invention relates to: (1) a composition for water-repellent treatment of a semiconductor substrate surface comprising a) at least one kind of a compound selected from the group consisting of a long-chain alkyl tertiary amine and a long-chain alkyl ammonium salt, b) a base or an acid generating agent, having a condensed ring structure or forming a condensed ring structure by generating a base or an acid and c) a polar organic solvent, and (2) a method for water-repellent treatment of the semiconductor substrate surface having the pattern formed by laminating the Si-containing insulating layer and the metal layer, using the composition.
本发明的目的是:提供一种组合物,该组合物可用于一次性对具有通过层叠含
硅绝缘层和
金属层而形成的图案的半导体衬底的整个表面进行憎
水处理;以及一种使用该组合物对半导体衬底表面进行憎
水处理的方法。
本发明涉及(1) 一种用于对半导体衬底表面进行憎
水处理的组合物,该组合物包含 a) 至少一种选自由长链烷基叔胺和长链烷基
铵盐组成的组的化合物;b) 碱或酸生成剂、(2) 使用该组合物对具有通过层压含
硅绝缘层和
金属层而形成的图案的半导体衬底表面进行憎
水处理的方法。