Synthesis and characterization of novel zinc precursors for ZnO thin film deposition by atomic layer deposition
作者:Seong Ho Han、Raphael Edem Agbenyeke、Ga Yeon Lee、Bo Keun Park、Chang Gyoun Kim、Young Kuk Lee、Seung Uk Son、Taek-Mo Chung
DOI:10.1039/c9dt04644e
日期:——
analysis revealed that all complexes exist as dimeric structures with distorted tetrahedral geometry having zinc centers that are interconnected via μ2-O bonding of the aminoalkoxy oxygen atom. TGA and thermal analysis of the complexes showed high volatilities and stabilities at sublimation temperatures of 70, 95, 90, and 105 °C at 0.5 Torr for the respective compounds. Precursor 3 was successfully used