A chemical mechanical polishing aqueous dispersion includes (A) colloidal silica having an average particle size calculated from the specific surface area determined by the BET method of 10 to 60 nm, (B) an organic acid having two or more carboxyl groups and one or more hydroxyl groups in one molecule, and (C) a quaternary ammonium compound shown by the following general formula (1),
wherein R1 to R4 individually represent hydrocarbon groups, and M- represents an anion, the chemical mechanical polishing aqueous dispersion having a pH of 3 to 5.
一种
化学机械抛光
水分散液包括:(A) 胶体
二氧化硅,其平均粒径根据 BET 法测定的比表面积计算为 10 至 60 纳米;(B) 有机酸,其一个分子中含有两个或两个以上的羧基和一个或一个以上的羟基;(C) 季
铵化合物,其通式如下(1)、
其中 R1 至 R4 分别代表烃基,M- 代表阴离子,
化学机械抛光
水分散液的 pH 值为 3 至 5。