申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2256552A1
公开(公告)日:2010-12-01
There is disclosed a negative resist composition comprising (A) a base polymer which is soluble in alkali and which is insolubilized in alkali by an action of an acid; and/or a combination of a crosslinking agent and a base polymer which is soluble in alkali and which is reacted with the crosslinking agent by an action of an acid to thereby be insolubilized in alkali, (B) an acid generator, and (C) a nitrogen-containing compound as a basic component; wherein the polymer to be used as the base polymer is: a polymer, which is obtained by polymerizing two or more kinds of monomers represented by the following general formula (1), or which is obtained by polymerizing a monomer mixture containing one or more kinds of monomers represented by the general formula (1) and one or more kinds of styrene monomers represented by the following general formula (2); or a polymer obtained by subjecting the functional groups of the polymerizedly obtained polymer to a further chemical conversion; and wherein the repeating units derived from the monomers represented by the general formula (1) are included in the obtained polymer at a sum ratio of 50 mole% or more relative to a total amount of all repeating units constituting the obtained polymer. There can be provided a negative resist composition having an excellent resolution and an enhanced etching resistance in photolithography for fine processing, and particularly in lithography adopting, as an exposure source, KrF laser, extreme ultraviolet rays, electron beam, X-rays, or the like; and a patterning process using the same.
本发明公开了一种抗蚀剂组合物,该组合物包括(A)可溶于碱且在酸的作用下在碱中不溶解的碱基聚合物;和/或交联剂与可溶于碱且在酸的作用下与交联剂反应从而在碱中不溶解的碱基聚合物的组合,(B)酸发生剂,和(C)作为碱性组分的含氮化合物;其中用作碱基聚合物的聚合物是:(A)可溶于碱且在酸的作用下在碱中不溶解的碱基聚合物,(B)酸发生剂,和(C)作为碱性组分的含氮化合物:通过聚合两种或两种以上由以下通式(1)表示的单体而得到的聚合物,或通过聚合含有一种或多种由以下通式(1)表示的单体和一种或多种由以下通式(2)表示的苯乙烯单体的单体混合物而得到的聚合物;或将聚合得到的聚合物的官能团进行进一步化学转化而得到的聚合物;以及 其中,由通式(1)代表的单体衍生的重复单元以相对于构成所得到的聚合物的所有重复单元总量 50 摩尔%或更高的总和比率包含在所得到的聚合物中。本发明可提供一种在用于精细加工的光刻技术中,特别是在采用 KrF 激光、极紫外线、电子束、X 射线或类似光源作为曝光源的光刻技术中,具有优异的分辨率和增强的抗蚀刻性的负型抗蚀剂组合物;以及使用该组合物的图案化工艺。