A method of preparing an ultra-pure organometallic compound comprising using a microchannel device for synthesis in reacting a metal halide with an alkylating agent to produce an ultra-pure alkylmetal compound for processes such as chemical vapor deposition.
一种制备超纯有机
金属化合物的方法,包括使用微通道装置进行合成,通过将
金属卤化物与烷基化剂反应,以产生超纯的烷基
金属化合物,用于
化学气相沉积等过程。