申请人:Brainard Robert L.
公开号:US20140193752A1
公开(公告)日:2014-07-10
There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.
公开了磺酸前体组合物,以及使用这些组合物进行光刻等方法。还公开了其他实施例。