ACTINIC RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY- OR RADIATION-SENSITIVE FILM AND METHOD OF FORMING PATTERN
申请人:FUJIFILM Corporation
公开号:US20140234759A1
公开(公告)日:2014-08-21
According to one embodiment, there is provided an actinic ray- or radiation-sensitive resin composition containing
(A) a resin containing a repeating unit represented by general formula (1) below and a repeating unit that is decomposed by an action of an acid to generate an alkali-soluble group, and
(B) a compound that generates the acid when exposed to actinic rays or radiation,
where
L represents a bivalent connecting group,
R
1
represents a hydrogen atom or an alkyl group, and
Z represents a cyclic acid anhydride structure.