ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM AND PATTERN FORMING METHOD EACH USING THE COMPOSITION, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND PRODUCTION METHOD OF RESIN
申请人:FUJIFILM CORPORATION
公开号:US20140212797A1
公开(公告)日:2014-07-31
An actinic ray-sensitive or radiation-sensitive resin composition includes: (P) a resin that contains (A) a repeating unit capable of decomposing upon irradiation with an actinic ray or radiation to generate an acid in a side chain of the resin (P) and (C) a repeating unit represented by the following formula (I) as defined in the specification, wherein a polydispersity of the resin (P) is 1.20 or less.
[EN] ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM AND PATTERN FORMING METHOD EACH USING THE COMPOSITION, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND PRODUCTION METHOD OF RESIN<br/>[FR] COMPOSITION DE RÉSINE SENSIBLE À UN RAYONNEMENT ACTINIQUE OU SENSIBLE AUX RAYONS ACTINIQUE, COUCHE DE RÉSERVE ET PROCÉDÉ DE FORMATION D'UN MOTIF QUI UTILISENT CHACUN LA COMPOSITION, PROCÉDÉ DE FABRICATION D'UN DISPOSITIF SEMI-CONDUCTEUR, DISPOSITIF SEMI-CONDUCTEUR ET PROCÉDÉ DE PRODUCTION DE LA RÉSINE
申请人:FUJIFILM CORP
公开号:WO2013047895A1
公开(公告)日:2013-04-04
An actinic ray-sensitive or radiation-sensitive resin composition includes: (P) a resin that contains (A) a repeating unit capable of decomposing upon irradiation with an actinic ray or radiation to generate an acid in a side chain of the resin (P) and (C) a repeating unit represented by the following formula (I) as defined in the specification, wherein a polydispersity of the resin (P) is 1.20 or less.