GAS SENSOR, GAS MEASURING SYSTEM USING THE GAS SENSOR, AND GAS DETECTION MODULE FOR THE GAS MEASURING SYSTEM
申请人:Ideal Star Inc.
公开号:EP2154520A1
公开(公告)日:2010-02-17
Provided are a gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor is provided with a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response changing in response to a voltage which is applied to the pair of electrodes and which periodically varies and reverses in polarity.
本发明提供了一种气体传感器、一种使用这种气体传感器的气体测量系统和一种用于气体测量系统的气体检测模块。该气体传感器包括一个含有介电半导体的气体检测装置,气体检测装置的导电率随气体对气体检测装置的吸附程度而变化;一个串联在气体检测装置上的电容元件、和一对电极,这对电极连接到由气体检测装置和电容元件组成的电子元件的电端子上,其中气体传感器能够根据施加到这对电极上的电压的电响应变化来检测气体检测装置的气体吸附程度,该电压周期性地变化和极性反转。