ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, METHOD FOR PRODUCING ELECTRONIC DEVICE, AND RESIN
申请人:FUJIFILM Corporation
公开号:EP3761114A1
公开(公告)日:2021-01-06
An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition with which a pattern thus formed has excellent LER and collapse suppressing ability. Furthermore, another object of the present invention is to provide a resist film, a pattern forming method, a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition. In addition, still another object of the present invention is to provide a resin which can be used in the actinic ray-sensitive or radiation-sensitive resin composition.
The actinic ray-sensitive or radiation-sensitive resin composition of the present invention is an actinic ray-sensitive or radiation-sensitive resin composition including a compound that generates an acid upon irradiation with actinic rays or radiation, and a resin whose polarity increases by the action of an acid,
in which the resin includes a repeating unit represented by General Formula (B-1), and a content of the repeating unit represented by General Formula (B-1) is 5% to 70% by mass with respect to all the repeating units in the resin. In General Formula (B-1), R1 represents a hydrogen atom or an organic group, the Ring W1 represents a ring which includes at least one carbon atom and one nitrogen atom, and may have a substituent
本发明的一个目的是提供一种光敏或辐射敏感树脂组合物,使用这种组合物形成的图案具有优异的光辐射衰减率和塌陷抑制能力。此外,本发明的另一个目的是提供一种抗蚀剂薄膜、一种图案形成方法、一种制造电子设备的方法,每种方法都使用了对放 射线敏感或对辐射敏感的树脂组合物。此外,本发明的另一个目的是提供一种树脂,该树脂可用于光敏或辐射敏感树脂组合物中。
本发明的光敏或辐射敏感树脂组合物是一种光敏或辐射敏感树脂组合物,包括一种在光 线或辐射照射下会产生酸的化合物,以及一种在酸的作用下极性增强的树脂、
其中,树脂包括通式(B-1)表示的重复单元,通式(B-1)表示的重复单元的含量占树脂中所有重复单元质量的 5%至 70%。在通式(B-1)中,R1 代表氢原子或有机基团,环 W1 代表一个环,该环至少包括一个碳原子和一个氮原子,并可带有一个取代基。