申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US11407063B2
公开(公告)日:2022-08-09
A protective film forming agent for dicing of semiconductor wafers for forming a protective film on the surface of the semiconductor wafers and capable of forming a protective film of high absorbance index, and a production method of semiconductor chips using the protective film forming agent. In a protective film forming agent containing a water-soluble resin, light absorber and solvent, a compound having a specific structure is used as the light absorber. The content of the light absorber in the protective film forming agent is 0.1% by mass or more and 10% by mass or less.
一种用于半导体晶片切割的保护膜形成剂,可在半导体晶片表面形成保护膜,并能形成高吸收指数的保护膜,以及一种使用该保护膜形成剂的半导体芯片生产方法。在含有水溶性树脂、光吸收剂和溶剂的保护膜形成剂中,使用了具有特定结构的化合物作为光吸收剂。光吸收剂在保护膜成型剂中的含量为 0.1%(以质量计)以上,10%(以质量计)以下。