A composition capable of forming porous films which are excellent in dielectric characteristics, close adhesion, uniformity of application, and mechanical strengths and are reduced in moisture absorption; porous films; a process for the production of the films; and semiconductor devices which have the films built-in and exhibit high performance and high reliability. The composition comprises a surfactant and a solution containing a polymer obtained by condensation of at least one alkoxysilane represented by the general formula (1) with at least one alkoxysilane represented by the general formula (2) through hydrolysis in the presence of a surfactant: (R<1>)mSi(OR<2>)4-m (1) R<3>Si(R<4>)n(OR<5>)3-n (2) (wherein R<1> is substituted or unsubstituted hydrocarbyl; R<2> is alkyl having 1 to 4 carbon atoms; R<3> is linear or branched alkyl having 8 to 30 carbon atoms; R<4> is substituted or unsubstituted hydrocarbyl; R<5> is alkyl having 1 to 4 carbon atoms; m is an integer of 0 to 3; and n is an integer of 0 to 2). The process comprises the step of applying the composition and the step of converting the obtained coating film into a porous film.
一种能形成多孔薄膜的组合物,该多孔薄膜在介电特性、紧密粘合性、应用均匀性和机械强度等方面都很出色,而且吸湿性较低;多孔薄膜;生产该薄膜的工艺;以及内置该薄膜并表现出高性能和高可靠性的半导体器件。该组合物包括表面活性剂和含有聚合物的溶液,聚合物是由通式(1)代表的至少一种烷氧基
硅烷与通式(2)代表的至少一种烷氧基
硅烷在表面活性剂存在下通过
水解缩合得到的:(R)mSi(OR)4-m (1) RSi(R)n(OR)3-n (2) (其中 R 是取代或未取代的烃基;R 是具有 1 至 4 个碳原子的烷基;R 是具有 8 至 30 个碳原子的直链或支链烷基;R 是取代或未取代的烃基;R 是具有 1 至 4 个碳原子的烷基;m 是 0 至 3 的整数;n 是 0 至 2 的整数)。该工艺包括施用组合物的步骤和将获得的涂膜转化为多孔膜的步骤。