A near-infrared absorbing dye has an anion of formula (1) wherein A
1
is H or CF
3
, R
0
is OH or —OC(═O)—R′, and R′ is a monovalent hydrocarbon group. The dye has excellent solvent solubility as well as good optical properties and heat resistance, offering the advantages of easy coating and effective working during film formation. The dye free of heavy metal in its structure is advantageously used in the process of fabricating semiconductor devices.
一种近红外吸收
染料具有如下式(1)的阴离子,其中A1为H或
CF3,R0为OH或—OC(═O)—R′,而R′为一价
碳氢基团。该
染料具有优异的溶剂溶解性以及良好的光学性能和耐热性,提供易于涂覆和在薄膜形成过程中有效工作的优点。该
染料在其结构中不含重
金属,因此在制造半导体器件的过程中具有优势应用。