This disclosure relates to a semiconductor resist composition including an organometallic compound represented by Chemical Formula 1 and a solvent, and to a method of forming patterns using the composition:
wherein, in Chemical Formula 1, R
1
is an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or an -alkylene-O-alkyl group, and R
2
to R
4
are each independently selected from —OR
a
and —OC(═O)R
b
.
这份披露涉及一种包括
化学式1所代表的有机
金属化合物和溶剂的半导体抗蚀组合物,以及使用该组合物形成图案的方法:在
化学式1中,R1是脂肪烃基、
芳香烃基或-烷基-氧-烷基,R2到R4分别独立地选自—ORa和—OC(═O)Rb。