SEMICONDUCTOR RESIST COMPOSITION, AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
申请人:Samsung SDI Co., Ltd.
公开号:US20200117085A1
公开(公告)日:2020-04-16
This disclosure relates to a semiconductor resist composition including an organometallic compound represented by Chemical Formula 1 and a solvent, and to a method of forming patterns using the composition:
wherein, in Chemical Formula 1, R
1
is an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or an -alkylene-O-alkyl group, and R
2
to R
4
are each independently selected from —OR
a
and —OC(═O)R
b
.
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
申请人:Samsung SDI Co., Ltd.
公开号:US20210356861A1
公开(公告)日:2021-11-18
A semiconductor photoresist composition includes an organometallic compound represented by Chemical Formula 1, an organic acid having a vapor pressure of less than or equal to about 1.0 mmHg at 25° C., and a pKa of about 3 to about 5, and a solvent. A method of forming photoresist patterns utilizes the composition.
SEMICONDUCTOR PHOTORESIST COMPOSITION, AND METHOD OF FORMING PATTERNS USING THE COMPOSITION
申请人:Samsung SDI Co., Ltd.
公开号:US20210109442A1
公开(公告)日:2021-04-15
Disclosed are a semiconductor photoresist composition including an organometallic compound including at least one selected from compounds represented by Chemical Formulae 1 to 3 and a solvent, and a method of forming patterns using the semiconductor photoresist composition on an etching-objective layer to form a photoresist layer, patterning the photoresist layer to form a photoresist pattern, and etching the etching-objective layer using the photoresist pattern as an etching mask.