An intermediate layer composition for a three-layer resist process comprising (A) an octakis(silsesquioxane) skeleton-containing polymer obtained by hydrosilylation polymerization of a compound represented by formula (I) defined in the specification with bis(substituted ethynyl) compound in the presence of a platinum-containing catalyst.
一种用于三层抗蚀剂工艺的中间层组合物,包括 (A) 在含
铂催化剂存在下,通过将说明书中定义的式 (I) 所代表的化合物与双(取代
乙炔基)化合物进行氢
硅化聚合而得到的含
辛烷基(
硅倍半氧烷)骨架的聚合物。