申请人:Kim Mi Young
公开号:US20080118875A1
公开(公告)日:2008-05-22
A hardmask composition includes a solvent and an organosilicon copolymer. The organosilicon copolymer may be represented by Formula A:
(SiO
1.5
—Y—SiO
1.5
)
x
(R
3
SiO
1.5
)
y
(A)
wherein x and y may satisfy the following relations: x is about 0.05 to about 0.9, y is about 0.05 to about 0.9, and x+y=1, R
3
may be a C
1
-C
12
alkyl group, and Y may be a linking group including a substituted or unsubstituted, linear or branched C
1
-C
20
alkyl group, a C
1
-C
20
group containing a chain that includes an aromatic ring, a heterocyclic ring, a urea group or an isocyanurate group, or a C
2
-C
20
group containing one or more multiple bonds.