Acenaphthylene derivative, polymer, and antireflection film-forming composition
申请人:JSR Corporation
公开号:EP1386904B1
公开(公告)日:2008-09-17
COMPOSITION FOR FORMING RESIST LOWER LAYER FILM
申请人:Yoshimura Nakaatsu
公开号:US20110251323A1
公开(公告)日:2011-10-13
A composition for forming a resist lower layer film, which contains (A) a resin, (B) a butyl ether group-containing crosslinking agent and (C) a solvent.