A radiation sensitive composition comprising a film-forming resin and a bis(sulfonyl)diazomethane compound of the following formula (1) or (2): ##STR1## wherein each of R.sup.1 and R.sup.3 is a linear, branched or cyclic alkyl group which may be substituted, R.sup.2 is a halogen atom, an alkoxy group which may be substituted, a nitro group, a cyano group, a nitrile group or an amide group, and each of R.sup.4, R.sup.5 and R.sup.6 which are independent of one another, is a linear, branched or cyclic alkyl group which may be substituted, a halogen atom, an alkoxy group which may be substituted, a nitro group, a cyano group, a nitrile group or an amide group.
一种辐射敏感组合物,包括一种能形成薄膜的
树脂和以下式子(1)或(2)的双(磺酰基)
重氮甲烷化合物:##STR1## 其中,R^1和R^3各自是线性、支链或环烷基,可以被取代;R^2是卤素原子、可以被取代的烷氧基、硝基、
氰基、腈基或酰胺基;R^4、R^5和R^6各自独立地是线性、支链或环烷基,可以被取代,是卤素原子、可以被取代的烷氧基、硝基、
氰基、腈基或酰胺基。