Method of producing a crosslinked coating in the manufacture of integrated circuits
申请人:Hessell T. Edward
公开号:US20050215713A1
公开(公告)日:2005-09-29
The present invention is directed to a method of providing a thermally curable coating composition for to provide positive photoresists layers, underlayers for multiple layer resists, antireflective coatings, bottom layer antireflective coatins, dielectric layers, photoresist layers, hard mask etch stops, in the manufacture of integrated circuits. More particularly, the present invention is directed to a method of using a thermally activable latent acid or a thermal acid generator, a N-benzylpyridinium or N-benzylanilinium salt of a strong acid, as a catalyst in a polymerizable composition suitable for preparing such coatings and layers. The present invention is also directed to novel compositions comprising benzylpyridinium and benzylanilinium salts of a strong acid, such as sulfonic acid or disulfonic acid as thermal acid generators.
本发明涉及一种提供热固性涂层组合物的方法,用于提供正向光刻层、多层光刻底层、抗反射涂层、底层抗反射涂层、介电层、光刻层、硬膜层刻停等,用于集成电路的制造。更具体地,本发明涉及一种使用热活性潜酸或热酸发生剂、强酸的N-苄基吡啶或N-苄基苯胺盐作为催化剂的聚合物组合物的方法,适用于制备这种涂层和层。本发明还涉及一种新型组合物,包括苄基吡啶和苄基苯胺盐,作为热酸发生剂的强酸,如磺酸或二磺酸。