In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
第一方面,提供了含有聚酯
树脂成分的有机涂层组合物,特别是旋涂型减反射涂层组合物。再一方面,本发明提供的涂层组合物含有通过聚合多羟基化合物获得的
树脂成分。本发明的涂层组合物与覆膜光刻胶层结合使用,特别适用于制造集成电路。