申请人:Daicel Chemical Industries, Ltd.
公开号:US06692889B1
公开(公告)日:2004-02-17
A polymeric compound of the invention includes at least one monomer unit selected from the following formulae (I), (II), (III) and (IV):
(wherein R1 is a hydrogen atom or a methyl group, R2 and R3 are each a hydrogen atom, a hydroxyl group or a —COOR4 group, where R4 is, e.g., a t-butyl group or a 2-tetrahydropyranyl group; R5 and R6 are each a hydrogen atom, a hydroxyl group or an oxo group; R7, R8 and R9 are each a hydrogen atom or a methyl group; R10 and R11 are each a hydrocarbon group having 1 to 8 carbon atoms; R12, R13 and R14 are each a hydrogen atom, a hydroxyl group or a methyl group, where if all of R12 to R14 are each a hydrogen atom or a hydroxyl group, R10 and R11 are not coincidentally methyl groups) [wherein, when the compound includes, for example, a monomer unit of Formula (III), the compound further includes at least one monomer unit selected from among, for example, a monomer unit represented by the following Formula (V):
(wherein R15 and R16 are each a hydrogen atom, a hydroxyl group or a carboxyl group; R17 is a hydroxyl group, an oxo group or a carboxyl group; and R1 has the same meaning as defined above)]. This polymeric compound has high etching resistance, as well as satisfactory transparency, alkali-solubility and adhesion, and is therefore useful as a photoresist resin.
本发明的聚合物化合物包括至少一种单体单元,所述单体单元选自以下式子(I)、(II)、(III)和(IV):(其中R1是氢原子或甲基基团,R2和R3分别是氢原子、羟基或—COOR4基团,其中R4是例如叔丁基基团或2-四氢吡喃基团;R5和R6分别是氢原子、羟基或酮基;R7、R8和R9分别是氢原子或甲基基团;R10和R11分别是具有1至8个碳原子的碳氢基团;R12、R13和R14分别是氢原子、羟基或甲基基团,其中如果R12至R14全部为氢原子或羟基,则R10和R11不是重合的甲基基团)[其中,当化合物包括例如公式(III)的单体单元时,化合物还包括至少一种单体单元,所述单体单元选自例如由以下公式(V)表示的单体单元:(其中R15和R16分别是氢原子、羟基或羧基;R17是羟基、酮基或羧基;R1具有上述定义的相同含义)]。该聚合物化合物具有高蚀刻抗性,同时具有令人满意的透明度、碱溶性和附着力,因此可用作光刻胶树脂。