申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:EP1643306A1
公开(公告)日:2006-04-05
A resist composition is disclosed that enables formation of a favorable resist pattern using a shrink process in which, following formation of the resist pattern, a treatment such as heating is used to narrow the resist pattern, and also disclosed are a laminate and a method for forming a resist pattern that use such a resist composition. This resist composition includes a resin component (A) that displays changed alkali solubility under the action of acid, and an acid generator component (B) that generates acid on exposure. The component (A) contains structural units derived from a (meth)acrylate ester, and exhibits a glass transition temperature that falls within a range from 120 to 170°C.
本发明公开了一种抗蚀剂组合物,该组合物可以使用收缩工艺形成有利的抗蚀图案,在抗蚀图案形成后,使用加热等处理方法缩小抗蚀图案,本发明还公开了使用这种抗蚀剂组合物的层压板和形成抗蚀图案的方法。这种抗蚀剂组合物包括在酸作用下碱溶解性发生变化的树脂成分(A)和在曝光时产生酸的酸发生器成分(B)。组分(A)包含由(甲基)丙烯酸酯衍生的结构单元,其玻璃化温度在 120 至 170°C 之间。