COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, UNDERLAYER FILM FOR LITHOGRAPHY, AND PATTERN FORMATION METHOD
申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:US20200249573A1
公开(公告)日:2020-08-06
The present invention provides a composition for resist underlayer film formation comprising a tellurium-containing compound or a tellurium-containing resin.
本发明提供了一种用于抗蚀底层膜形成的组合物,其包括含碲化合物或含碲树脂。
OPTICAL COMPONENT FORMING COMPOSITION AND CURED PRODUCT THEREOF
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US20200262787A1
公开(公告)日:2020-08-20
The present invention provides an optical component forming composition comprising a tellurium-containing compound or a tellurium-containing resin.
本发明提供了一种包括含碲化合物或含碲树脂的光学元件成型组合物。
Mild Reduction of Tellurium(IV) and Selenium(IV) Compounds by Sodium Ascorbate
作者:Lars Engman、Joachim Persson
DOI:10.1080/00397919308009800
日期:1993.2
Abstract Sodium ascorbate was found to mildly reduce organyltellurium trihalides to diorganyl ditellurides, organylselenium trihalides to diorganyl diselenides, diorganyltellurium dihalides and oxides to diorganyl tellurides and diorganylselenium dihalides and oxides to diorganyl selenides.
MONOMERS, POLYMERS AND LITHOGRAPHIC COMPOSITIONS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20190202955A1
公开(公告)日:2019-07-04
New monomer and polymer materials that comprise one or more Te atoms. In one aspect, tellurium-containing monomers and polymers are provided that are useful for Extreme Ultraviolet Lithography.
Evaluation of sulfur, selenium and tellurium catalysts with antioxidant potential
作者:Gregory I. Giles、Fiona H. Fry、Karen M. Tasker、Andrea L. Holme、Chris Peers、Kim N. Green、Lars-Oliver Klotz、Helmut Sies、Claus Jacob
DOI:10.1039/b308117f
日期:——
Oxidative stress is implicated, either directly or indirectly, in the pathology of a range of human diseases. As a consequence, the development of efficient antioxidants for medical use has become increasingly important. We have synthesised a range of structurally related organo-sulfur, -selenium and -tellurium agents and demonstrated that a combination of electrochemical methodology, in vitro assays