Composition for film formation and material for insulating film formation
申请人:JSR CORPORATION
公开号:US20020172652A1
公开(公告)日:2002-11-21
A composition for film formation capable of forming a coating film excellent in low dielectric constant characteristics, cracking resistance, modulus of elasticity, and adhesion to substrates and useful as an interlayer insulating film material in semiconductor devices, etc. The composition for film formation contains (A) at least one member selected from an aromatic polyarylene and an aromatic poly (arylene ether), (B) a polyvinylsiloxane, and (C) an organic solvent.
Photosensitive coating composition consisting essentially of an ethylenic unsaturated compound, a photoinitiator or photoinitiator system, an organic polymeric binder, discrete, substantially nonswellable, nonagglomerating, crosslinked beads, 0.1 to 4.0 µm in average diameter size, at least 90% of the beads by population below 10 µm, as defined and a solvent for the binder. The crosslinked beads can be present in positive-working systems. Preferred beads are trimethylolpropane triacrylate. The coating composition can be dried quickly into the form of a film which is useful as a dry film photoresist.
LAMINATE AND METHOD FOR FORMATION THEREOF, INSULATING FILM, SEMICONDUCTOR DEVICE, AND COMPOSITION FOR FORMING FILM
申请人:JSR Corporation
公开号:EP1679184A1
公开(公告)日:2006-07-12
A laminate having a low relative dielectric constant and exhibiting excellent adhesion, a method of forming the laminate, an insulating film, a semiconductor device, and a film-forming composition are provided.
A laminate according to the invention includes: a first silica-based film; a second silica-based film; and an organic film, wherein the second silica-based film includes a monovalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond.
A method of forming a laminate according to the invention includes: forming a first coating for a first silica-based film on a substrate; forming a second coating for a second silica-based film on the first coating, the second coating including a monovalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond; forming a third coating for an organic film on the second coating; and curing a multilayer film including the first to third coatings.
Polymer, process for production, composition for film formation containing the same, method of film formation, and insulating film
申请人:JSR CORPORATION
公开号:US20020161173A1
公开(公告)日:2002-10-31
a composition for film formation which can be cured in a short time period and give a film having a low dielectric constant and excellent in heat resistance, adhesion and cracking resistance, a polymer for use in the composition and a process for producing the polymer. The composition prepared by dissolving the polymer having specific repeating units in a solvent has excellent film-forming properties. The polymer has repeating units represented by the following general formula (1):
1
wherein Z and Y are as defined hereinabove.
一种可在短时间内固化并能形成具有低介电常数和优异耐热性、粘附性和抗裂性的薄膜的成膜组合物、一种用于该组合物的聚合物以及一种生产该聚合物的工艺。将具有特定重复单元的聚合物溶解在溶剂中制备的组合物具有优异的成膜性能。该聚合物具有由以下通式(1)表示的重复单元:
1
其中 Z 和 Y 如上文所定义。
Stacked film, insulating film and substrate for semiconductor
申请人:JSR CORPORATION
公开号:US20030077461A1
公开(公告)日:2003-04-24
A stacked film for semiconductor having superior adhesion to a coating film formed by a CVD process in, for example, semiconductor devices, an insulating film having the stacked film and a substrate for semiconductor using the insulating film are disclosed. The stacked film comprises (A) a film of an organic compound having a carbon content of 60% by weight or more and (B) a film prepared by heating a hydrolytic condensate obtained by hydrolysis and condensation of at least one compound selected from the group consisting of specific compounds represented by the general formulae (51) to (54) described hereinabove.