The present invention provides a salt of the formula (I):
wherein ring X represents polycyclic hydrocarbon group having tricycle or more and having 10 to 30 carbon atoms, and one or more hydrogen atom in the ring X is optionally substituted with alkyl group having 1 to 6 carbon atoms, alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms or cyano group; Q
1
and Q
2
each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; n shows an integer of 1 to 12; and A
+
represents a cation selected from the group consist of a cation of the following formulae (IIa), (IIb) and (IIc):
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
本发明提供了一种公式(I)的盐:其中,环X代表具有10至30个碳原子的
三环或更多多
环烃基团,并且环X中的一个或多个氢原子可被选自1至6碳原子的烷基、1至6碳原子的烷氧基、1至4碳原子的
全氟烷基或腈基团所取代;Q1和Q2各自独立地代表
氟原子或具有1至6碳原子的
全氟烷基;n表示1至12的整数;A+代表由以下公式(IIa)、(IIb)和(IIc)组成的阳离子群中选择的一种阳离子:本发明还提供了一种包含公式(I)盐的
化学放大抗蚀剂组合物。