A radiation-sensitive resin composition including (A) a resin containing an alicyclic skeleton in its backbone, and (B) a radiation-sensitive acid-generating agent, is provided. This composition is excellent in transparency with respect to radiation and dry etching resistance, and can give a photoresist pattern excellent in adhesion to substrates, sensitivity, resolution, and developability.
本发明提供了一种辐射敏感
树脂组合物,其中包括 (A) 主干中含有脂环族骨架的
树脂和 (B) 辐射敏感酸生成剂。这种组合物在抗辐射和抗干蚀刻方面具有极佳的透明度,并能产生对基底具有极佳附着力、灵敏度、分辨率和显影性的光刻胶图案。