申请人:Atotech Deutschland GmbH
公开号:US11035051B2
公开(公告)日:2021-06-15
The present invention relates to an acidic aqueous composition (plating bath) for electrolytic copper plating (electrolytic deposition of copper), the composition comprising
(i) copper (II) ions,
(ii) one or more than one compound of Formula (Ia)
(iii) one, two, three or more than three further compounds, which are different from the compound of Formula (Ia),
with the definitions given below, the use of the acidic aqueous composition according to the invention for electrolytic copper plating, the use of the compound of Formula (Ia) in an acidic aqueous composition for electrolytic metal plating, a method of electrolytic copper plating using the acidic aqueous composition according to the invention, and specific compounds derived from Formula (Ia) for an acidic aqueous composition for electrolytic metal plating.
本发明涉及一种用于电解镀铜(电解沉积铜)的酸性水性组合物(镀槽),该组合物包括
(i) 铜 (II) 离子、
(ii) 一种或一种以上的式 (Ia) 化合物
(iii) 一种、两种、三种或三种以上不同于式(Ia)化合物的其他化合物、
根据下文给出的定义,根据本发明的酸性水性组合物在电解镀铜中的用途、式 (Ia) 化合物在电解金属镀金酸性水性组合物中的用途、使用根据本发明的酸性水性组合物进行电解镀铜的方法,以及由式 (Ia) 衍生出的特定化合物在电解金属镀金酸性水性组合物中的用途。