The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):
wherein
M represents a metal atom;
R1 represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms;
R2 and R3 may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R2 and R3 may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound;
Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); and
n represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3;
with the proviso that
the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded;
the metal compounds in which M is Mg (Magnesium) and R1 is methyl group are excluded;
the metal compounds in which M is Zn (Zinc) and R1 is methyl group are excluded;
the metal compounds in which M is Bi (Bismuth) and R1 is t-butyl group are excluded; and
in cases where n is two or greater, two or more ligands may be the same as, or different from each other;
and a method of producing a metal-containing thin film using the metal compound.
本发明涉及一种由式(1)表示的(酰胺
氨基烷基)
金属化合物:其中M代表
金属原子;R1代表具有1至6个碳原子的线性、支链或环烷基;R2和R3可以相同,也可以不同,且分别独立地表示具有1至3个碳原子的线性或支链烷基,或者R2和R3可以与它们所结合的氮原子一起形成取代或未取代的5-或6元环;Z表示具有1至10个碳原子的线性或支链亚烷基(其中一部分可以选择性地形成环),n表示
配体的数量,它等于
金属(M)的价数,并表示从1到3的整数;但是排除M为
锂(Lithium)、
铍(Beryllium)、
锗(Germanium)或
钕(Neodymium)的
金属化合物;排除M为
镁(Magnesium)且R1为甲基基团的
金属化合物;排除M为
锌(Zinc)且R1为甲基基团的
金属化合物;排除M为
铋(Bismuth)且R1为叔丁基基团的
金属化合物;在n为2或更大的情况下,两个或更多
配体可以相同或不同;以及使用该
金属化合物制备含
金属薄膜的方法。