申请人:MicroSi, Inc. (a Delaware corporation)
公开号:EP0361627A2
公开(公告)日:1990-04-04
The sharpness of an image produced in a layer of photoresist by imagewise exposure of said layer from a light source emitting light of a predetermined wavelength is improved by providing a contrast-enhancing layer comprising a novel photobleachable compound between the light source and the photoresist layer. The novel photobleachable compound is an aryl nitrone having an absorption maximum in the range of 300-450 nanometers selected from
α-(4-diethylaminophenyl)-N-phenylnitrone,
α-(4-diethylaminophenyl)-N-(4-chlorophenyl)nitrone,
α-(4-diethylaminophenyl)-N-(3,4-dichlorophenyl)nitrone,
α-(4-diethylaminophenyl)-N-(4-ethoxycarbonylphenyl)nitrone,
α-(4-diethylaminophenyl)-N-(4-acetylphenyl)nitrone,
α-(9-julolidinyl)-N-phenylnitrone,
α-(9-julolidinyl)-N-(4-chlorophenyl)nitrone,
α-(4-dimethylaminophenyl)-N-(4-cyanophenyl)nitrone,
α-(4-methoxyphenyl)-N-(4-cyanophenyl)nitrone,
α- [ 2-(1-phenylpropenyl)] -N-phenylnitrone, and
α-[2-(1,1-diphenylethenyl)]-N-phenylnitrone.
通过在光源和光刻胶层之间提供一个包含新型光漂白化合物的对比度增强层,可以提高光刻胶层在发射预定波长光的光源下进行图像曝光后产生的图像的清晰度。新型光漂白化合物是一种芳基腈酮,其吸收最大值在 300-450 纳米范围内,选自 α-(4-二乙基氨基苯基)-N-苯基腈酮、
α-(4-二乙基氨基苯基)-N-(4-氯苯基)硝酮、α-(4-二乙基氨基苯基)-N-(3,4-二氯苯基)硝酮、α-(4-二乙基氨基苯基)-N-(4-乙氧基羰基苯基)硝酮、
α-(4-二乙基氨基苯基)-N-(4-乙酰基苯基)腈酮、α-(9-菊烷基)-N-苯基腈酮、α-(9-菊烷基)-N-(4-氯苯基)腈酮、α-(4-二甲基氨基苯基)-N-(4-氰基苯基)腈酮、
α-(4-甲氧基苯基)-N-(4-氰基苯基)硝酮、α-[2-(1-苯基丙烯基)]-N-苯基硝酮和 α-[2-(1,1-二苯基乙烯基)]-N-苯基硝酮。