ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN WITH THE COMPOSITION
申请人:TSUCHIMURA Tomotaka
公开号:US20110171577A1
公开(公告)日:2011-07-14
An actinic ray-sensitive or radiation-sensitive resin composition includes any of the compounds of general formula (I) below;
wherein:
Ar represents an aromatic ring that may have a substituent other than the -(A-B) groups;
n is an integer of 1 or greater;
A represents any one, or a combination of two or more members selected from a single bond, an alkylene group, —O—, —S—, —C(═O)—, —S(═O)—, —S(═O)
2
— and —OS(═O)
2
—, provided that —C(═O)O— is excluded;
B represents a group containing a hydrocarbon group having 4 or more carbon atoms wherein either a tertiary or a quaternary carbon atom is contained,
when n is 2 or greater, the two or more -(A-B) groups may be identical to or different from each other; and
M
+
represents an organic onium ion.
一种感光射线敏感或辐射敏感的树脂组合物包括下列通式(I)中的任何一种化合物;其中:Ar代表可能具有除了-(A-B)基团以外的取代基的芳香环;n是大于等于1的整数;A代表从单键、烷基、—O—、—S—、—C(═O)—、—S(═O)—、—S(═O)2—和—OS(═O)2—中任意选择一个或两个或两个以上成员的组合,但不包括—C(═O)O—;B代表一个含有4个或更多碳原子的烃基团,其中包含一个三级或季级碳原子,当n大于等于2时,两个或两个以上的-(A-B)基团可以相同或不同;M+代表有机阳离子。