申请人:Yamato Hitoshi
公开号:US20080085458A1
公开(公告)日:2008-04-10
The invention pertain to novel photoacid generator compounds of the formula I, II or III
wherein
R
1
is for example C
1
-C
18
alkylsulfonyl or phenylsulfonyl, phenyl-C
1
-C
3
alkylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, all optionally substituted, or R
1
is a group
X
1
, X
2
and X
3
independently of each other are O or S;
R′
1
, is e.g. phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, all optionally substituted;
R
2
is halogen or C
1
-C
10
haloalkyl;
X is halogen;
Ar
1
is for example biphenylyl or fluorenyl, or is substituted naphthyl;
Ar′
1
is heteroarylene, optionally substituted;
R
8
, R
9
, R
10
and R
11
for example are C
1
-C
6
alkyl which is unsubstituted or substituted by halogen; or R
8
, R
9
and R
10
are phenyl which is unsubstituted or substituted by C
1
-C
4
alkyl or halogen; or R
10
and R
11
together are 1,2-phenylene or C
2
-C
6
alkylene which is unsubstituted or substituted by C
1
-C
4
alkyl or halogen.