申请人:AKITA Makoto
公开号:US20100233628A1
公开(公告)日:2010-09-16
A compound represented by the formula (I):
wherein R
1
represents a hydrogen atom etc., R
2
and R
3
each independently represent a hydrogen atom etc., R
4
represents a C1-C8 divalent hydrocarbon group, R
5
represents a single bond etc., and R
6
represents an unsubstituted or substituted C6-C20 aromatic hydrocarbon group, a polymer comprising a structural unit derived from the compound represented by the formula (I) and a chemically amplified positive resist composition comprising the polymer, at least one acid generator and at least one solvent.
化合物的化学式为(I):其中R1代表氢原子等,R2和R3分别独立地代表氢原子等,R4代表C1-C8二价碳氢基团,R5代表单键等,R6代表未取代或取代的C6-C20芳香族碳氢基团,聚合物包括从化合物的化学式(I)所表示的结构单元派生而来的结构单元和化学增感正电性光阻组合物,该组合物包括聚合物、至少一种酸发生剂和至少一种溶剂。