申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20200241418A1
公开(公告)日:2020-07-30
A positive resist composition comprising a base polymer comprising recurring units (a) having the structure of an ammonium salt of a carboxylic acid having an iodized or brominated aromatic ring exhibits a high sensitivity, high resolution, low edge roughness (LER, LWR) and small size variation, and forms a pattern of good profile after exposure and development.